Microsystem Design

Microsystem Design


Yazar Stephen D. Senturia
Yayınevi Springer
ISBN 9780792372462
Baskı yılı 2005
Sayfa sayısı 722
Ağırlık 1.13 kg
Edisyon 1
Stok durumu Var    Stok detayları
Kargoya teslim Aynı gün kargo

It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this books publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer - one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
Foreword
Preface
Acknowledgments
Pt. I Getting Started
1 Introduction 3
2 An Approach to Mems Design 15
3 Microfabrication 29
4 Process Integration 79
Pt. II Modeling Strategies
5 Lumped Modeling 103
6 Energy-Conserving Transducers 125
7 Dynamics 149
Pt. III Domain-Specific Details
8 Elasticity 183
9 Structures 201
10 Energy Methods 239
11 Dissipation and the Thermal Energy Domain 267
12 Lumped Modeling of Dissipative Processes 299
13 Fluids 317
Pt. IV Circuit and System Issues
14 Electronics 353
15 Feedback Systems 397
16 Noise 425
Pt. V Case Studies
17 Packaging 453
18 A Piezoresistive Pressure Sensor 469
19 A Capacitive Accelerometer 497
20 Electrostatic Projection Displays 531
21 A Piezoelectric Rate Gyroscope 561
More...

Axess
Axess

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

cardFinans
cardFinans

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

Bonus
Bonus

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

World
World

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

Maximum
Maximum

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

Paraf
Paraf

Taksit Taksit Tutarı Toplam Tutar
Tek çekim - 4074.43 TL
2 ay 2149.26 TL 4298.53 TL
3 ay 1446.42 TL 4339.27 TL
6 ay 750.37 TL 4502.25 TL
9 ay 518.36 TL 4665.23 TL
12 ay 402.35 TL 4828.20 TL

Kredi Kartı (Tek Çekim)
Kredi Kartı (Tek Çekim)

Taksit Taksit Tutar ı Toplam Tutar
Peşin - 4074.43 TL

Bonus, Maximum, Paraf, Cardfinans, Axess ve World özelliği olan tüm kartlar ile ödeme yapılabilir.